JPS6411543U - - Google Patents
Info
- Publication number
- JPS6411543U JPS6411543U JP10521287U JP10521287U JPS6411543U JP S6411543 U JPS6411543 U JP S6411543U JP 10521287 U JP10521287 U JP 10521287U JP 10521287 U JP10521287 U JP 10521287U JP S6411543 U JPS6411543 U JP S6411543U
- Authority
- JP
- Japan
- Prior art keywords
- storage carrier
- semiconductor wafer
- wafer storage
- grooves
- semiconductor wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 10
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10521287U JPS6411543U (en]) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10521287U JPS6411543U (en]) | 1987-07-10 | 1987-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6411543U true JPS6411543U (en]) | 1989-01-20 |
Family
ID=31337619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10521287U Pending JPS6411543U (en]) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6411543U (en]) |
-
1987
- 1987-07-10 JP JP10521287U patent/JPS6411543U/ja active Pending